Type: | Ceramic Target |
---|---|
Shape: | Plate |
Certification: | SGS |
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Material Type
|
Silicon
|
Symbol
|
Si
|
Composition
|
Si
|
Purity
|
>99.9%
|
Color/Apperance
|
Gray
|
Density
|
>2.2g/cm3(>95%)
|
Molding process
|
HPS
|
Resisitivity(20ºC)
|
<20ohm.cm
|
Maximum Impurities
|
Fe:150
Ca:26
Cr:30
|
Cu:50
Al:500
Ni:30
|
N: 300
Mn:20
O:6000
|
Silicon | ||
Type | Ceramic Target | |
Purity | 99.999% | |
Specification | according drawing | |
color | silvery | |
Shape | planar,Round | |
Certificate | SGS, The third test report | |
Grade | Industrial Grade | |
Usage | Thin Film Coating | |
Application | PVD Process |