Type: | Ceramic Target |
---|---|
Shape: | Plate |
Certification: | SGS |
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Material Type | Silicon | Symbol | Si |
Composition | Si | Purity | >99.9% |
Color/Apperance | Gray | Density | >2.2g/cm3(>95%) |
Molding process | HPS | Resisitivity(20ºC) | <20ohm.cm |
Maximum Impurities | Fe:150 Ca:26 Cr:30 | Cu:50 Al:500 Ni:30 | N: 300 Mn:20 O:6000 |
Silicon | ||
Type | Ceramic Target | |
Purity | 99.999% | |
Specification | according drawing | |
color | silvery | |
Shape | planar,Round | |
Certificate | SGS, The third test report | |
Grade | Industrial Grade | |
Usage | Thin Film Coating | |
Application | PVD Process |