Type: | Metal Target |
---|---|
Shape: | Rotary |
Certification: | ISO |
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Aluminum (Al) Tube Sputtering Target
Product List:
Item | Purity | Shape | Backing Plate/Plate | Quality Certificate |
Si | 99.999%/5N | Round/Plate/Tube | Cooper/ Titanium | ISO9001,RoHS |
Mo | 99.99%/4N | Round/Plate/Tube | Cooper/ Titanium | ISO9001,RoHS |
MoNb | 99.90%/3N | Round/Plate/Tube | Cooper/ Titanium | ISO9001,RoHS |
Nb2Ox | 99.99%/4N | Round/Plate/Tube | Cooper/ Titanium | ISO9001,RoHS |
AlSc | 99.9%/99.99% | Round/Plate/Tube | Cooper/Titanium | ISO9001,RoHS |
SiO2 | 99.99% /4N | Round/Plate/Tube | Cooper/Titanium | ISO9001,RoHS |
Cu | 99.99% ~ 99.999% | Round/Plate/Tube | Cooper/Titanium | ISO9001,RoHS |
AlNd | >99.99% | Round/Plate/Tube | Cooper/Titanium | ISO9001,RoHS |
Al | 99.999% | Round/Plate/Tube | Cooper/Titanium | ISO9001,RoHS |
Tolerance:
Thickness(mm) | tolerances(mm) | width(mm) | tolerances(mm) | length(mm) | tolerances(mm) | flatness(%) |
0.1mm | ±0.01 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
0.2mm | ±0.02 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
0.3mm | ±0.02 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
0.4mm | ±0.03 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
0.5mm | ±0.03 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
0.8mm | ±0.05 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
1.0mm | ±0.06 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
1.5mm | ±0.06 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
2.0mm | ±0.06 | 600mm | ±1mm | 2000mm | ±5mm | < 2% |
3.0mm | ±0.20 | 500mm | ±1mm | 500mm | ±2mm | < 2% |
4.0mm | ±0.20 | 500mm | ±1mm | 500mm | ±2mm | < 2% |