Top quality Si sputtering target Silicon target,can be different size or length
We offer a wide range of ceramic and metallic sputter targets,in planar and rotatable shape,a complete range of targets.
Our rotatable sputter targets are available in lengths up to 4M.Any shorter tube is available.
We are able to produce dog-bone and straight targets,depending on the material and production method requested.
Application,widely used in conductive glass,STN/TN/TFT-LCD,Optical glass,ion plating,etc...Applicable to all planar coating and rotary coating system
Technical Parameter
Material Type | Silicon | Symbol | Si |
Composition | Si | Purity | >99.9% |
Color/Apperance | Gray | Density | >2.2g/cm3(>95%) |
Molding process | HPS | Resisitivity(20ºC) | <20ohm.cm |
Maximum Impurities | Fe:150Ca:26 Cr:30 | Cu:50Al:500 Ni:30 | N: 300Mn:20 O:6000 |
1.Our sputtering targets mainly consist of pure metals and alloys, available in both planar and rotatable shapes.
Featured targets from Rhexon:
1.Pure Metal:
Ti, Zr, Ta, Nb, Mo, W, Ni, Cr, Al, Zn, Si, Cu,ITO,AZO.TZO,WC,Nb2O5,TiO2, SiO2 with planar and rotary type.,
2.Typical alloy target :
1) Ti/Al alloy target (67:33,50:50at%)
2) W/Ti alloy target (90:10wt%),
3) Ni/V alloy target (93:7,wt%)
4) Ni/Cr alloy target (80:20, 70:30,wt%),
5) Al/Cr alloy target (70:30,50:50at%)
6) Nb/Zr alloy target (97:3,90:10wt%
7) Si/Al alloy target (90:10,95:5,98:2,70:30,wt%)
8) Zn/Al alloy
9)Pure Cr target (99.95%, 99.995%)
10)Al/Cr alloy target (70:30, 50:50at%)
11) Ni/Cu alloy target (70:30,80:20,wt%)
12)Al/Nd alloy target (98:2wt%)
13)Mo/Nb alloy target (90:10,wt%)
14)TiAlSi alloy target (Ti/Al/Si=30/60/10, 33/67, 40/50/10 ,wt% and at%)
15)CrAlSi alloy target (Cr/Al/Si=30/60/10 ,wt% and at%)and so on, and help set of target material
2.Our Sputtering Target Products :
Materials | Type | Product | Shape |
ceramic | Si | silicon sputtering target | rotarable |
NbOx | Niobium Oxide sputtering target | rotarable |
TiOx | Titanium Oxide sputtering target | rotarable |
AZO | Alumina doped zinc oxide sputtering target | rotarable/ planar |
ITO | Indium Tin Oxide sputtering target | rotarable |
metal | Mo | Molybdenum sputtering target | rotarable/ planar |
Cr | Cr Rotary Sputtering target | rotarable |
Sn | Stannum sputterig target | rotarable |
alloy | SiAl | SiAl sputtering target | rotarable |
NiCr | Nickle chromium sputtering target | rotarable/ planar |
ZnSn | Zinc Stannum sputtering target | rotarable |
ZnAl | Zinc Aluminum sputtering target | rotarable |
CuInGa | CuInGa sputtering target | rotarable |