99.999% Hige Purity Silicon Target, Sprayed Sial Alloy Target

Product Details
Type: Cylinder, Plane
Manufacturing Technology: Discrete Device
Material: High Purity Silicon
Gold Member Since 2018

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Plant Area
101~500 square meters
Management System Certification
ISO 9001, ISO 14001, QHSE
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Basic Info.

Model NO.
Silicon ingot, rod, piece, tube, ring
Transport Package
Wooden Box Vacuum
Production Capacity
50 Tons / Year

Product Description



1.Our sputtering targets mainly consist of pure metals and alloys, available in both planar and rotatable shapes.
Featured targets from Rhexon:
1.Pure Metal:
Ti, Zr, Ta, Nb, Mo, W, Ni, Cr, Al, Zn, Si, Cu,ITO,AZO.TZO,WC,Nb2O5,TiO2, SiO2 with planar and rotary type.,
 
2.Typical alloy target :
1) Ti/Al alloy target (67:33,50:50at%)
2) W/Ti alloy target (90:10wt%),
3) Ni/V alloy target (93:7,wt%)
4) Ni/Cr alloy target  (80:20, 70:30,wt%),
5) Al/Cr alloy  target (70:30,50:50at%)
6) Nb/Zr alloy  target (97:3,90:10wt%
7) Si/Al alloy target (90:10,95:5,98:2,70:30,wt%)
8) Zn/Al alloy
9)Pure Cr  target (99.95%, 99.995%)
10)Al/Cr alloy target (70:30, 50:50at%)
11) Ni/Cu alloy target (70:30,80:20,wt%)
12)Al/Nd alloy target (98:2wt%)
13)Mo/Nb alloy target (90:10,wt%)
14)TiAlSi  alloy target (Ti/Al/Si=30/60/10, 33/67, 40/50/10 ,wt% and at%)
15)CrAlSi  alloy target (Cr/Al/Si=30/60/10 ,wt% and at%)and so on, and help set of target material


2.Our Sputtering Target Products :
MaterialsTypeProductShape
ceramicSisilicon sputtering targetrotarable 
NbOxNiobium Oxide sputtering targetrotarable 
TiOxTitanium Oxide sputtering targetrotarable 
AZOAlumina doped zinc oxide sputtering targetrotarable/ planar
ITOIndium Tin Oxide sputtering targetrotarable
metalMoMolybdenum sputtering targetrotarable/ planar
CrCr Rotary Sputtering targetrotarable 
SnStannum sputterig targetrotarable
alloySiAlSiAl sputtering targetrotarable 
NiCrNickle chromium sputtering targetrotarable/ planar
ZnSnZinc Stannum sputtering targetrotarable
ZnAlZinc Aluminum sputtering targetrotarable
CuInGaCuInGa sputtering targetrotarable


 

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